Test apparatus and manufacturing method

A method of manufacturing a test substrate that is electrically connected to a plurality of devices under test formed on a wafer under test and that tests the devices under test, the method comprising:

• forming, on the test substrate using photolithography, a programmable device that generates a digital test signal corresponding to program data supplied thereto;
• forming, on the test substrate using photolithography, a test circuit that generates an analog test signal;
• forming, on the test substrate using photolithography, a plurality of input/output circuits that correspond to a plurality of terminals of each device under test and that are each electrically connected to the corresponding terminal;
• and
• forming, on the test substrate using electron beam lithography, at least a portion of wires that connect the programmable device and the input/output circuits and wires that connect the test circuit and the input/output circuits, according to a type of device under test to be tested.