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US 2011/0218134 A1Published application
Photosensitive-resin remover composition and method of fabricating semiconductor device using the same
AssigneesSamsung Electronics Co., Ltd., Techno Semichem Co., Ltd.
InventorsAhn-Ho Lee, Junghun Lim, Young Taek Hong, Hyuntak Kim, Seonghwan Park, Baiksoon Choi, Seunghyun Ahn, Byungil Lee
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Abstract
A photosensitive-resin remover composition includes an amine compound and de-ionized water, an amount of the de-ionized water being about 45% to about 99% by weight based on a total weight of the composition.
Claims11
A photosensitive-resin remover composition, comprising:
- an amine compound;
- and
- de-ionized water, an amount of the de-ionized water being about 45% to about 99% by weight based on a total weight of the composition.
A photosensitive-resin remover composition, comprising:
- hydrazine hydrate in an amount of about 1% to about 3% by weight;
- a removing accelerator in an amount of about 1% to about 3% by weight;
- butyl diglycol in an amount of about 10% to about 40% by weight;
- and
- de-ionized water in an amount of about 70% to about 88% by weight,
- wherein a structure of the removing accelerator is represented by Formula 4,
- wherein n is an integer of 3 or 4, and each of R6 and R7 is independently hydrogen, a carboxylic group, a C1-4 alkoxy group, a C1-4 alkyl group, or a C1-4 alkyl alcohol group.
4 more elements
11-20. (canceled)
Dependencies are inferred from the claim text.