Integrated circuit device and method for fabricating same with an interposer substrate
OwnerHarry Hedler, Roland Irsigler +1inventors
InventorsHarry Hedler, Roland Irsigler, Andreas Wolter
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OwnerHarry Hedler, Roland Irsigler +1inventors
InventorsHarry Hedler, Roland Irsigler, Andreas Wolter
Estimating the term…
Fabricating an integrated circuit device includes providing a semiconductor substrate comprising a first surface and a second surface, forming a wiring layer on the first surface of the semiconductor substrate, providing a circuit chip, and arranging the circuit chip on the wiring layer of the semiconductor substrate. The fabricating further includes forming an embedding layer on the wiring layer and on the circuit chip, the embedding layer encapsulating the circuit chip, thinning the semiconductor substrate at the second surface after forming the embedding layer, and forming a conductive via in the semiconductor substrate being electrically coupled to the wiring layer and exposed at the second surface of the semiconductor substrate. Moreover, an integrated circuit device is described.
A method of fabricating an integrated circuit device, comprising:
Dependencies are inferred from the claim text.