Fabrication System and Manufacturing Method of Light Emitting Device

A manufacturing method for a light emitting device comprising the steps of:

• forming a semiconductor film over a substrate having an insulating surface;
• irradiating the semiconductor film with a laser beam from a laser by relatively moving at least one of the substrate and the laser beam in a first direction;
• patterning the semiconductor film to form a patterned semiconductor layer including a channel region of a thin film transistor;
• forming a first electrode electrically connected to the thin film transistor;
• forming a film containing an organic compound over the first electrode by relatively moving at least one of the substrate and an evaporation source holder provided with the organic compound in a second direction different from the first direction;
• and
• forming a second electrode over the film containing the organic compound,
• wherein the evaporation source holder contains a plurality of containers being arranged in a longitudinal direction of the evaporation source holder.

A manufacturing method for a light emitting device comprising the steps of:

• forming a semiconductor film over a substrate having an insulating surface;
• irradiating the semiconductor film with a laser beam from a laser by relatively moving at least one of the substrate and the laser beam in a first direction;
• patterning the semiconductor film to form a plurality of patterned semiconductor layers including channel regions of a plurality of thin film transistors;
• forming a first electrode electrically connected to at least one of the plurality of thin film transistors;
• forming a film containing an organic compound over the first electrode by relatively moving at least one of the substrate and an evaporation source holder provided with the organic compound in a second direction different from the first direction;
• and
• forming a second electrode over the film containing the organic compound,
• wherein the evaporation source holder contains a plurality of containers being arranged in a longitudinal direction of the evaporation source holder, and
• wherein the plurality of thin film transistors have the same conductivity.

A manufacturing method for a light emitting device comprising the steps of:

• forming a semiconductor film over a substrate having an insulating surface;
• irradiating the semiconductor film with a laser beam from a laser by relatively moving at least one of the substrate and the laser beam;
• patterning the semiconductor film to form a patterned semiconductor layer including a channel region of a thin film transistor;
• forming a first electrode electrically connected to the thin film transistor;
• forming a first functional region containing a first organic compound on the first electrode by relatively moving at least one of the substrate and a first evaporation source holder provided with the first organic compound;
• foaming a first mixed region containing the first organic compound and a second organic compound on the first functional region by relatively moving at least one of the substrate and the first evaporation source holder and a second evaporation source holder provided with the second organic compound;
• forming a second functional region containing the second organic compound on the first mixed region by relatively moving at least one of the substrate and the second evaporation source holder;
• and
• forming a second electrode over the second functional region,
• wherein in each of the first and second evaporation source holders, a plurality of containers are arranged in a longitudinal direction of each of the first and second evaporation source holders.

A system for manufacturing a light emitting device including a film formation chamber, the film formation chamber comprising:

• an evaporation source holder;
• a substrate holding means over the evaporation source holder;
• and
• a mask over the substrate holding means,
• wherein the evaporation source holder includes a plurality of containers being arranged in a longitudinal direction of the evaporation source holder and, in each of the plurality of containers, an evaporation material is contained, and
• wherein, in the evaporation source holder, evaporation centers of adjacent two containers are crossed each other.