Method of manufacturing an ink jet print head
AssigneeOce-Technologies B.V.
InventorAlex N. WESTLAND
Life of this patent
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Abstract
In a method of manufacturing an ink jet print head that includes a number of aligned modules, an alignment mark is foamed on a first and a second adjacent module, wherein the alignment mark is positioned on a boundary between the first and the second adjacent module along which the wafer is to be separated. In a separating step the wafer is separated into separate modules such that the alignment mark is divided over said first and second adjacent module. At least one of said first and second module is aligned by reference to the divided alignment mark. The method improves the accuracy, with which the modules can be aligned.
Claims10
A method of manufacturing an ink jet print head that comprises a number of aligned modules, comprising the steps of:
- forming a plurality of said modules on a wafer;
- forming an alignment mark on a first and a second adjacent module, wherein the alignment mark is positioned on a boundary between the first and the second adjacent module along which the wafer is to be separated;
- separating the wafer into separate modules such that the alignment mark is divided over said first and second adjacent module;
- and
- aligning at least one of said first and second module by reference to the divided alignment mark.
Dependencies are inferred from the claim text.