Microelectronic workpiece processing systems and associated methods of color correction
AssigneeMicron Technology, Inc.
InventorsKevin Tetz, Charles M. Watkins
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Abstract
Several embodiments of semiconductor systems and associated methods of color corrections are disclosed herein. In one embodiment, a method for producing a light emitting diode (LED) includes forming an (LED) on a substrate, measuring a base emission characteristic of the formed LED, and selecting a phosphor based on the measured base emission characteristic of the formed LED such that a combined emission from the LED and the phosphor at least approximates white light. The method further includes introducing the selected phosphor onto the LED via, for example, inkjet printing.
Claims25
A method for producing a light emitting diode (LED), comprising:
- forming an (LED) on a substrate;
- measuring a base emission characteristic of the formed LED;
- selecting a phosphor based on the measured base emission characteristic of the formed LED such that a combined emission from the LED is closer to white light than the reference emission characteristic;
- and
- introducing the selected phosphor onto the LED.
A method of color correction of light emitting diodes (LEDs), comprising:
- measuring a base emission characteristic of individual LEDs on a substrate;
- developing an emission map of the LEDs on the substrate based on the measured base emission characteristics;
- for the individual LEDs, determining at least one of a composition and a concentration of a converter material based on the emission map of the LEDs;
- and
- introducing the selected phosphor onto the individual LEDs on the substrate.
A system for processing a semiconductor substrate, comprising:
- a substrate support configured to individually carry a microelectronic workpiece containing a plurality of light emitting diodes (LEDs);
- a container holding a phosphor;
- an injector operatively coupled to the container, the injector being configured to introduce a volume of the phosphor onto the individual LEDs of the microelectronic workpiece;
- and
- a controller operatively coupled to the injector, the controller having a computer-readable storage medium containing instructions which, when executed, cause the controller to perform a method comprising:
- receiving a base emission characteristic of the individual LEDs of the microelectronic workpiece;
- adjusting a characteristic of the phosphor based on the received base emission characteristic of the individual LEDs;
- and
- introducing the phosphor with the adjusted characteristic onto the individual LEDs.
A computer-readable medium containing a data structure, the data structure including:
- a base emission wavelength;
- a number of phosphors corresponding to the base emission wavelength;
- and
- a ratio of the number of phosphors.
Dependencies are inferred from the claim text.