Lithium or barium based film getters
OwnerKonstantin CHUNTONOVinventor
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Abstract
Two film materials, one of them with the structure of barium eutectic and another one with the structure of lithium solid solution, manufactured by thermal deposition. The mentioned films may give a freedom of choice of the sealing methods starting from the standard bonding processes with heating under vacuum to common gluing at room temperature.
Claims17
A film getter device comprising:
- two or more layers of a Ba—Al composition;
- a coating layer of Al, coating said two or more layers;
- and
- a substrate, which is protected by a barrier layer of Cr.
A film getter device comprising:
- a thin metallic strip;
- a Li composition with a thin Mg-coating and a Ti composition film with a thin Ag or Pd-coating;
- and
- wherein, each of said compositions covers another side of said metal strip.
A method of production of film getters, comprising:
- alternately depositing layers of two different reactive gas sorbent components
- on a substrate;
- wherein the last layer deposited also acts as a cover layer.
A film getter device comprising:
- one or more layers of a LiPd composition;
- a coating layer of Pd, coating said one or more layers;
- and
- a substrate, which is protected by a barrier layer of Cr, wherein:
- said substrate is especially allotted for a deposition area inside a vacuum chamber.
A method of capturing residual gases in small sealed-off devices using:
- a film getter device comprising:
- two or more layers of a Ba—Al composition;
- a coating layer of Al, coating said two or more layers;
- and
- a substrate, which is protected by a barrier layer of Cr.
A method of capturing residual gases in small sealed-off devices using:
- a film getter device comprising:
- two or more layers of a Ba—Al composition;
- a coating layer of Al, coating said two or more layers;
- and
- a substrate, which is protected by a barrier layer of Mn.
A method of capturing residual gases in small sealed-off devices using:
- a film getter device comprising:
- two or more layers of a Ba—Al composition;
- a coating layer of Al, coating said two or more layers;
- and
- a metallic substrate.
Dependencies are inferred from the claim text.