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US 2011/0217454 A1Published application
Method for manufacturing piezoelectric film
AssigneeSeiko Epson Corporation
InventorYasuaki HAMADA
Life of this patent
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Abstract
A method for manufacturing a piezoelectric film includes: forming a piezoelectric precursor film including Bi, Fe, Mn, Ba, and Ti; and obtaining a piezoelectric film preferentially oriented with the (110) plane by crystallizing the piezoelectric precursor film.
Claims6
A method for manufacturing a piezoelectric film comprising:
- forming a piezoelectric precursor film including Bi, Fe, Mn, Ba, and Ti;
- and
- obtaining a piezoelectric film preferentially oriented with the (110) plane by crystallizing the piezoelectric precursor film.
Dependencies are inferred from the claim text.