Measuring flow properties of multiple gas nozzles of a gas distributor

A gas nozzle measurement apparatus comprising:

• (a) a controllable gas source to provide a flow of gas at a constant pressure or constant flow rate across gas nozzles of a gas plate;
• and
• (b) a sensor plate comprising a thermal sensing wafer capable of converting the pressure, flow rate, density, or velocity of gas streams from the gas nozzles in the gas plate impinging on the thermal sensing wafer into a thermal map.

A gas nozzle measurement apparatus comprising:

• (a) a controllable gas source to provide a flow of gas at a constant pressure or constant flow rate across gas nozzles of a gas plate;
• and
• (b) a sensor plate comprising a substrate coated with a uniform coat of pressure-sensitive paint capable of changing in a property with application of a pressure from a gas stream from a gas nozzle of the gas plate.

A gas nozzle measurement apparatus comprising:

• (a) a controllable gas source to provide a flow of gas at a constant pressure or constant flow rate across gas nozzles of a gas plate;
• and
• (b) a sensor plate comprising a transparent wafer having a film heater that provides a uniform heat input to be cooled to different extents across its area depending upon the flow of an impinging gas stream from a gas nozzle.

A gas nozzle measurement apparatus comprising:

• (a) a controllable gas source to provide a flow of gas at a constant pressure or constant flow rate across gas nozzles of a gas plate;
• and
• (b) a sensor plate comprising a substrate having a chemically-reactive coating which reacts to produce a discernible change in color upon impingement of a gas stream from a gas nozzle of a gas plate.

A gas nozzle measurement apparatus comprising:

• (a) a controllable gas source to provide a flow of gas at a constant pressure or constant flow rate across gas nozzles of a gas plate;
• and
• (b) a sensor vessel comprising a viscous sensing fluid that receives a plurality of gas streams emanating from the gas nozzles of the gas plate and retains a measurement memory of the pressure, flow, density or velocity of the gas streams.

A gas nozzle measurement apparatus comprising:

• (a) a controllable gas source to provide a flow of gas at a constant pressure or constant flow rate across gas nozzles of a gas plate;
• and
• (b) a sensor plate comprising a plurality of microtube sensors that are each capable of sensing a pressure, flow rate, density or velocity of an impinging gas stream from a gas nozzle of the gas plate, the microtube sensors being arranged in locations that correspond to positions of individual gas nozzles of the array of gas nozzles in the gas plate such that each microtube sensor can measure a pressure, flow rate, density or velocity of a gas stream passing through an individual gas nozzle that faces the microtube sensor.

A gas nozzle measurement apparatus comprising:

• (a) a controllable gas source to provide a flow of gas at a constant pressure or constant flow rate across gas nozzles of a gas plate;
• and
• (b) a sensor plate comprising thermochromic liquid crystals capable of changing the color of reflected light based on the temperature of the thermochromic liquid crystals such that the sensor plate can display a pressure, flow, density or velocity of a gas stream passing through an individual gas nozzle that faces the sensor plate.