US 2011/0217148 A1 · VACUUM PROCESSING APPARATUS AND PROGRAM

Abstract

The present invention provides an efficient transferring control method in a vacuum processing apparatus of a linear tool in which plural vacuum robots are arranged in transferring mechanical units to which process chambers are connected and processing-target members are passed and received among the plural vacuum robots. In addition, the present invention provides a vacuum processing apparatus in which there are provided plural controlling methods, and a unit which determines whether rates of the transferring robots are to be controlled or rates of the process chambers are to be controlled on the basis of processing time of each processing-target member and switches the controlling method in accordance with a site whose rate is controlled.

Claims7

Dependent claims

A vacuum processing apparatus comprising:

process chambers in which predetermined processes are performed for processing-target members;
transferring mechanical units including vacuum robots that pass and receive the processing-target members;
transferring intermediate units through which the transferring mechanical units are connected to each other and which relay and carry the processing-target members;
and
a controlling unit that controls passing, receiving, relaying, and transferring of the processing-target members,
wherein the controlling unit has a unit for determining methods of transferring the processing-target members to the process chambers and the transferring intermediate units on the basis of time required for the process chambers to process the processing-target members in the process chambers.

3 more elements

Dependencies are inferred from the claim text.

Vacuum processing apparatus and program

Life of this patent

Vacuum processing apparatus and program

Life of this patent

Abstract

Claims7