Multi-channel surface plasmon resonance sensor using beam profile ellipsometry

A multi-channel surface plasmon resonance sensor using beam profile ellipsometry, comprising:

• a vertical illumination type focused-beam ellipsometer in which light is polarized, a part of the polarized light is focused to a metal thin film having multi-channels by using an objective lens part, and then the polarized light reflected from the metal thin film is detected so as to measure a ellipsometric phase change;
• a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer so as to generate surface plasmon resonance (SPR) according to an angle change of the polarized light;
• and
• a multi-channel flow unit which supplies a buffer solution containing a bio material binding to or dissociation from the metal thin film generating surface plasmon,
• wherein the SPR and the ellipsometric phase change by change in an angle and a wavelength are simultaneously detected,
• the multi-channel surface plasmon resonance sensor of claim 1, wherein the SPR sensing part comprises:
• a first lens which is a cylindrical shape converging lens for linearly focusing a part of the polarized light;
• and
• a second lens which is a single cylindrical lens or a group of cylindrical lenses that the metal thin film is deposited on a final surface of the lens so as to obtain a high numerical aperture together with the first lens.