Solid-state imaging device, method of fabricating solid-state imaging device, method of driving solid-state imaging device, and electronic apparatus

A method of fabricating a solid-state imaging device, comprising the steps of:

• forming a plurality of transistors in a substrate;
• forming a wiring layer on the substrate, the wiring layer having a plurality of wires laminated via an interlayer insulating film;
• forming a first electrode separately for each of pixels, on an illuminated side of the substrate, the first electrode being electrically connected to an amplifier gate electrode of an amplifier transistor of the plurality of transistors;
• forming a photoelectric conversion film made of an organic material or an inorganic material, on top of the first electrode;
• and
• forming a second electrode electrically connected to a voltage control circuit, on top of the photoelectric conversion film.

A method of driving a solid-state imaging device having

• a substrate,
• a photoelectric conversion element provided on a light incidence side of the substrate and including a photoelectric conversion film sandwiched between a first electrode provided separately for each of pixels, and a second electrode provided opposite the first electrode, the photoelectric conversion film being made of an organic material or an inorganic material and generating a signal charge according to a quantity of incident light,
• an amplifier transistor having an amplifier gate electrode connected to the first electrode, and
• a voltage control circuit that is connected to the second electrode, and supplies a desired voltage to the second electrode, the method comprising the steps of:
• supplying a first voltage to the second electrode from the voltage control circuit during a charge storage operation, to move the signal charge generated by the photoelectric conversion film toward the first electrode, and output a pixel signal by detecting a potential of the first electrode by the amplifier transistor;
• and
• supplying a second voltage to the second electrode from the voltage control circuit at a reset operation, to discharge the signal charge stored on the first electrode side, the second voltage being different from the first voltage supplied during the charge storage operation.

An electronic apparatus comprising:

• an optical lens;
• a solid-state imaging device on which light collected by the optical lens is made incident, the solid-state imaging device including
• a substrate,
• a photoelectric conversion element provided on a light incidence side of the substrate and including a photoelectric conversion film sandwiched between a first electrode provided separately for each of pixels, and a second electrode provided opposite the first electrode, the photoelectric conversion film being made of an organic material or an inorganic material and generating a signal charge according to a quantity of incident light,
• an amplifier transistor having an amplifier gate electrode connected to the first electrode, and
• a voltage control circuit that is connected to the second electrode, and supplies a desired voltage to the second electrode;
• and
• a signal processing circuit that processes an output signal outputted from the solid-state imaging device.