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US 2011/0216134 A1Published application
Liquid ejection head, liquid ejection device
AssigneeSeiko Epson Corporation
InventorYasuaki HAMADA
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Abstract
A liquid ejection head including a piezoelectric element having a piezoelectric layer and electrodes The piezoelectric layer is 3 μm or less in thickness. The piezoelectric layer is made of a piezoelectric material including bismuth manganate ferrate and barium titanate. The piezoelectric layer is preferentially oriented with the (110) plane.
Claims6
A liquid ejection head comprising:
- a piezoelectric element having a piezoelectric layer and electrodes, wherein
- the piezoelectric layer is 3 μm or less in thickness,
- the piezoelectric layer being made of a piezoelectric material including at least bismuth manganate ferrate and barium titanate, and
- the piezoelectric layer being preferentially oriented with the (110) plane.
1 more element
Dependencies are inferred from the claim text.