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US 2011/0216131 A1Published application
Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
AssigneeSeiko Epson Corporation
InventorYasuaki Hamada
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Abstract
There are provided a piezoelectric element comprising a first electrode, a piezoelectric layer and a second electrode, the piezoelectric layer is made of a piezoelectric material that contains a bismuth ferrite and silicon dioxide.
Claims7
A piezoelectric element comprising:
- a first electrode;
- a piezoelectric layer formed above the first electrode;
- and
- a second electrode formed above the piezoelectric layer, wherein:
- the piezoelectric layer is made of a piezoelectric material that contains a perovskite compound and silicon dioxide.
2 more elements
(canceled)
Dependencies are inferred from the claim text.