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US 2011/0216130 A1Published application
Piezoelectric element, liquid ejection head, and liquid ejection device
AssigneeSeiko Epson Corporation
InventorYasuaki HAMADA
Life of this patent
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Abstract
A piezoelectric element having a piezoelectric layer and electrodes. The piezoelectric layer is 3 μM or less in thickness. The piezoelectric layer is made of a piezoelectric material containing a perovskite compound including bismuth manganate ferrate and barium titanate. The piezoelectric layer is preferentially oriented with the (110) plane. The position (2θ) of the X-ray diffraction peak attributed to the (110) plane is 31.80° or more and 32.00° or less.
Claims5
A piezoelectric element comprising:
- a piezoelectric layer being 3 μm or less in thickness;
- and
- an electrode provided above the piezoelectric layer,
- wherein the piezoelectric layer is made of a piezoelectric material including at least bismuth manganate ferrate and barium titanate,
- the piezoelectric layer is preferentially oriented with the (110) plane, and,
- the position (2θ) of the X-ray diffraction peak attributed to the (110) plane is 31.80° or more and 32.00° or less.
3 more elements
Dependencies are inferred from the claim text.