Acoustic wave resonator and acoustic wave filter using the same
AssigneePanasonic Corporation
InventorsJoji FUJIWARA, Tetsuya Tsurunari, Hiroyuki Nakamura
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Abstract
An acoustic wave resonator includes a piezoelectric substrate and first and second comb-shaped electrodes provided on the piezoelectric substrate and interdigitating with each other. The first comb-shaped electrode includes a first busbar and first electrode fingers extending in a direction non-perpendicular to a direction in which the first busbar extends. The second comb-shaped electrode includes a second busbar and second electrode fingers extending from the second busbar and interdigitating with the first electrode fingers at an interdigitating region. This acoustic wave resonator can suppress a spurious response due to a transverse mode and has a high Q value.
Claims9
An acoustic wave resonator comprising:
- a piezoelectric substrate having an upper surface;
- and
- an interdigital transducer (IDT) electrode that includes a first comb-shaped electrode provided on the upper surface of the piezoelectric substrate and a second comb-shaped electrode provided on the upper surface of the piezoelectric substrate, the second comb-shaped electrode interdigitating with the first comb-shaped electrode,
- wherein the first comb-shaped electrode includes:
- a first busbar provided on the upper surface of the piezoelectric substrate to extend in a first direction;
- and
- a plurality of first electrode fingers that are provided on the upper surface of the piezoelectric substrate and that extend from the first busbar in a second direction non-perpendicular to the first direction,
- the second comb-shaped electrode includes:
- a second busbar provided on the upper surface of the piezoelectric substrate to extend in the first direction;
- and
- a plurality of second electrode fingers that are provided on the upper surface of the piezoelectric substrate and that extend from the second busbar in a third direction opposite to the second direction, the plurality of second electrode fingers interdigitating with the plurality of first electrode fingers at an interdigitating region.
Dependencies are inferred from the claim text.