Mems resonator
AssigneeNXP B.V.
InventorsJan Jacob Koning, Jozef Thomas Martinus Van Beek
Life of this patent
Estimating the term…
Abstract
A MEMS circuit comprises a MEMS device arrangement with temperature dependent output; a resistive heating circuit; and a feedback control system for controlling the resistive heating circuit to provide heating in order to maintain a MEMS device at a constant temperature. The heating is controlled in dependence on the ambient temperature, such that a MEMS device temperature is maintained at one of a plurality of temperatures in dependence on the ambient temperature. This provides power savings because the temperature to which the MEMS device is heated can be kept within a smaller margin of the ambient temperature.
Claims15
A MEMS circuit, comprising:
- a MEMS device arrangement with temperature dependent output;
- a resistive heating circuit;
- a feedback control system for controlling the resistive heating circuit to provide heating to maintain a MEMS device at a constant temperature;
- and
- a controller for controlling the heating in dependence on an ambient temperature, such that a MEMS device temperature is maintained at one of a plurality of temperatures in dependence on the ambient temperature.
A method of controlling a MEMS circuit having a MEMS device arrangement with temperature dependent output, the method comprising:
- controlling a resistive heating circuit (R1,R2) to provide heating in order to maintain a MEMS device at a constant temperature;
- wherein the heating is in dependence on an ambient temperature, such that a MEMS device arrangement temperature is maintained at one of a plurality of temperatures in dependence on the ambient temperature.
Dependencies are inferred from the claim text.