Operation voltage supply apparatus
OwnerShinobu WATANABEinventor
Life of this patent
Estimating the term…
Abstract
The voltage application probe and the voltage measurement probe are connected to the voltage application pad and the voltage measurement pad of the semiconductor device. The voltage application pad and the voltage measurement pad are connected by the conductor, measuring the voltage applied to the voltage application pad through the voltage measurement probe. The voltage compensation circuit in the voltage development device operates to make the voltage applied to the voltage application pad equal to the set voltage for the voltage development device. Even when the resistance between the voltage application probe and the voltage application pad increases, the accurate setting voltage is applied to the voltage application pad.
Claims5
An operation voltage supply apparatus for using a test of a semiconductor artifact having a plurality of pads including a voltage application pad and a voltage measurement pad, comprising:
- a variable voltage source connected to a ground potential for outputting a first voltage;
- a first operational amplifier connected to the variable voltage source for receiving the first voltage and outputting a second voltage;
- a second operational amplifier connected to the first operational amplifier for outputting a third voltage to the first operational amplifier;
- a voltage application probe to be connected to the voltage application pad for applying the second voltage to the voltage application pad;
- and
- a voltage measurement probe to be connected to the voltage measurement pad for receiving a fourth voltage from the voltage measurement pad and applying the fourth voltage to the second operational amplifier.
Dependencies are inferred from the claim text.