Method and apparatus for inspecting electronic component
AssigneeKabushiki Kaisha Toshiba
InventorKenji Norimatsu
Life of this patent
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Abstract
In one embodiment, a method for inspecting an electronic component includes preparing a current detector which is electrically connected to a current detection terminal via a gating device, and electrically connecting the current detection terminal to an interconnect which is in the electronic component and on which a failure portion is suspected to be generated. The method further includes pulsing an electron beam and irradiating the interconnect with the electron beam, and detecting a current generated when the interconnect is irradiated with the electron beam, by the current detector, while adjusting an opening and a closing of a gate in the gating device.
Claims20
A method for inspecting an electronic component, the method comprising:
- preparing a current detector which is electrically connected to a current detection terminal via a gating device;
- electrically connecting the current detection terminal to an interconnect which is in the electronic component and on which a failure portion is suspected to be generated;
- pulsing an electron beam and irradiating the interconnect with the electron beam;
- and
- detecting a current generated when the interconnect is irradiated with the electron beam, by the current detector, while adjusting an opening and a closing of a gate in the gating device.
An apparatus for inspecting an electronic component, the apparatus comprising:
- a current detection terminal to be electrically connected to an interconnect which is in the electronic component and on which a failure portion is suspected to be generated;
- a current detector electrically connected to the current detection terminal, and configured to detect a current generated in the interconnect;
- a gating device provided between the current detection terminal and the current detector, and configured to switch an opening and a closing of a gate so as to control whether or not the current is allowed to pass through the gate;
- an electron gun configured to generate an electron beam;
- a pulse beam generator configured to pulse the electron beam;
- and
- a gating adjustor configured to adjust the opening and the closing of the gate in the gating device, when the current detector detects the current generated when the interconnect is irradiated with the pulsed electron beam.
A method for inspecting an electronic component, the method comprising:
- detecting a current generated in an interconnect by a current detector electrically connected to the interconnect via a gating device while adjusting an opening and a closing of a gate in the gating device, the current being generated when the interconnect which is in the electronic component and on which a failure portion is suspected to be generated is irradiated with a pulsed electron beam;
- and
- generating a current image expressing a relationship between a position irradiated with the electron beam and the current detected by the current detector.
Dependencies are inferred from the claim text.