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US 2011/0215602 A1Published application
Pellicle handling tool
AssigneeShin-Etsu Chemical Co., Ltd.
InventorToru SHIRASAKI
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorToru SHIRASAKI
Estimating the term…
This invention discloses a handling tool for handling a pellicle which is used in the lithography carried out in a manufacturing process of semiconductor devices. The said tool comprises a handle, a main shaft connected with a fore-end of the handle to form a T-shaped part, two parallel arms protruding forward from the both ends of the said main shaft orthogonally to form a U-shaped part, and four pellicle frame holders of which two are each provided on the inward side surface of each arm respectively. Furthermore the said arms are designed in a manner such that they are both capable of moving towards and away from each other so as to be able to adjust the arm-to-arm distance, and the said holders are provided so that they can grasp the frame's side surfaces at the four corners of the pellicle frame when the said arms are closed.
A pellicle handling tool for handling a pellicle which is used in the lithography carried out in a manufacturing process of the semiconductor devices, characterized in that the said tool comprises a handle, a main shaft connected with a fore-end of the handle to form a T-shaped part, two parallel arms protruding forward from the both ends of the said main shaft orthogonally to form a U-shaped part, and four pellicle frame holders of which two are each provided on the inward side surface of each arm respectively, and the said arms are designed in a manner such that they are both capable of moving towards and away from each other so as to be able to adjust the arm-to-arm distance, and the said holders are provided so that they can grasp the frame's side surfaces at the four corners of the pellicle frame when the said arms are closed.
Dependencies are inferred from the claim text.