US 2011/0215490 A1 · Device of Producing Wafer Lens and Method of Producing Wafer Lens

Abstract

A device for producing a wafer lens, including: a stage which supports a glass substrate; an XY-axis moving mechanism which moves the stage on an XY-plane; an XY air slide guide mechanism which floats the stage relative to an XY guide by means of air, and guides the movement of the stage; a molding die to be filled with resin; a Z-axis moving mechanism which elevates or lowers the molding die; a Z air slide guide mechanism which floats the molding die relative to a Z guide by means of air, and guides the elevation and lowering of the molding die; and a control device which locks a moving position of the stage by controlling an activation and a deactivation of the XY air slide guide mechanism, and also locks a moving position of the molding die by controlling an activation or a deactivation of the Z air slide guide mechanism.

Claims9

Dependent claims

A device for producing a wafer lens, comprising:

a stage which supports a glass substrate;
an XY-axis moving mechanism which moves the stage on an XY-plane;
an XY air slide guide mechanism which floats the stage relative to an XY guide by means of air, and guides a movement of the stage caused by the XY-axis moving mechanism;
a molding die to be filled with resin;
a Z-axis moving mechanism which elevates or lowers the molding die;
a Z air slide guide mechanism which floats the molding die relative to a Z guide by means of air, and guides an elevation and lowering of the molding die caused by the Z-axis moving mechanism;
and
a control device which conducts at least one of
a locking operation of a moving position of the stage by controlling an activation and a deactivation of the XY air slide guide mechanism, and
a locking operation of a moving position of the molding die by controlling an activation or a deactivation of the Z air slide guide mechanism.

7 more elements

A method for producing a wafer lens, comprising the steps of:

moving a glass substrate along an XY guide on an XY-plane to a position to face a molding die, while making the glass substrate to float by supply of first air;
arranging the molding die at a predetermined height position by elevating or lowering the molding die along a Z guide to, while making a molding die to float by supply of second air;
and
elevating the molding die toward the glass substrate,
wherein in the step of elevating the molding die,
under a condition that the supply of the first air and the supply of the second air have been stopped,
the molding die is elevated toward the glass substrate.

4 more elements

Dependencies are inferred from the claim text.

Device of Producing Wafer Lens and Method of Producing Wafer Lens

Life of this patent

Device of Producing Wafer Lens and Method of Producing Wafer Lens

Life of this patent

Abstract

Claims9