Spectroscopic sensor and electronic apparatus
AssigneeSeiko Epson Corporation
InventorsAkira UEMATSU, Noriyuki NAKAMURA, Akira KOMATSU, Kunihiko YANO
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Abstract
A spectroscopic sensor has plural angle limiting filters that limit incident angles of incident lights, plural light band-pass filters that transmit specific wavelengths, and plural photodiodes to which corresponding transmitted lights are input. The spectroscopic sensor is a semiconductor device in which the angle limiting filters, the light band-pass filters, and the photodiodes are integrated, and, assuming that the surface on which impurity regions for the photodiodes are formed is a front surface of a semiconductor substrate, holes for receiving lights are formed in the impurity regions from the rear surface side.
Claims20
A spectroscopic sensor comprising:
- an impurity region for a photodiode formed on a semiconductor substrate;
- an angle limiting filter for limiting an incident angle of an incident light to a light receiving surface of the photodiode;
- and
- a light band-pass filter that transmits a specific wavelength of the incident light,
- wherein, assuming that the surface on which the impurity region for the photodiode is formed is a front surface of the semiconductor substrate, the angle limiting filter is formed using the semiconductor substrate left after formation of holes for receiving light towards the impurity region for the photodiode from a rear surface side of the semiconductor substrate.
Dependencies are inferred from the claim text.