Floating body cell structures, devices including same, and methods for forming same
AssigneeMicron Technology, Inc.
InventorsSanh D. Tang, John K. Zahurak, Werner Juengling
Life of this patent
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Abstract
Floating body cell structures including an array of floating body cells disposed on a back gate and source regions and drain regions of the floating body cells spaced apart from the back gate. The floating body cells may each include a volume of semiconductive material having a channel region extending between pillars, which may be separated by a void, such as a U-shaped trench. The floating body cells of the array may be electrically coupled to another gate, which may be disposed on sidewalls of the volume of semiconductive material or within the void therein. Methods of forming the floating body cell devices are also disclosed.
Claims30
A floating body cell structure, comprising:
- a back gate;
- at least one floating body comprising a semiconductive material and extending from the back gate to a source region and a drain region;
- and
- another gate associated with the at least one floating body.
A floating body cell device, comprising:
- a back gate;
- a plurality of floating bodies, each comprising a semiconductive material and extending from the back gate to a source region and a drain region;
- another gate associated with the plurality of floating bodies and operably coupled to a voltage source;
- and
- a common source line electrically coupling the source regions of the plurality of floating bodies and a bit line electrically coupling the drain regions of the plurality of floating bodies.
A floating body cell device, comprising:
- a plurality of floating bodies aligned in a first direction to form a plurality of rows and aligned in a second direction substantially perpendicular to the first direction to form a plurality of columns, each floating body comprising:
- a volume of semiconductive material having pillars extending from a base portion thereof and separated by a u-shaped trench, an upper portion of each of the pillars comprising a doped region;
- at least one back gate associated with the plurality of the floating bodies;
- and
- at least another gate associated with the plurality of floating bodies and operably coupled to a voltage source.
A method of forming a floating body cell device, comprising:
- forming a base comprising a semiconductive material, a dielectric material, a gate material, and an amorphous silicon material overlying a wafer;
- removing a portion of the semiconductive material to form a plurality of floating bodies protruding from a surface of the base;
- removing another portion of the semiconductive material to form a void in each of the plurality of floating bodies;
- exposing the plurality of floating bodies to at least one dopant to form a source region and a drain region in upper regions of each of the plurality of floating bodies;
- and
- forming a gate associated with at least one of the plurality of floating bodies.
A system, comprising:
- at least one memory device;
- and
- at least one floating body cell device operably coupled to the at least one memory device and comprising:
- an array of floating bodies, each floating body of the array comprising a volume of semiconductive material having pillars extending from a base portion thereof and separated by a u-shaped trench, an upper portion of each of the pillars comprising a doped region;
- at least one back gate associated with the array of floating bodies;
- and
- at least another gate associated with the array of floating bodies and operably coupled to a voltage source.
Dependencies are inferred from the claim text.