Semiconductor memory device and method for manufacturing same
AssigneeKabushiki Kaisha Toshiba
InventorsYosuke Komori, Masaru Kidoh, Ryota Katsumata
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AssigneeKabushiki Kaisha Toshiba
InventorsYosuke Komori, Masaru Kidoh, Ryota Katsumata
Estimating the term…
According to one embodiment, a semiconductor memory device includes a base, a stacked body, a memory film, a channel body, a contact plug, a global bit line, and a plurality of local bit lines. The base has a substrate and a peripheral circuit formed on the substrate. The stacked body has a plurality of conductive layers and insulating layers stacked alternately above the base. The memory film includes a charge storage film provided on an inner wall of a memory hole formed in a stacking direction of the stacked body. The channel body is provided inside the memory film in the memory hole. The contact plug is provided by piercing the stacked body. The global bit line is provided between the peripheral circuit and the stacked body and connected to a lower end portion of the contact plug. The plurality of local bit lines are provided above the stacked body and divided in an extending direction of the plurality of local bit lines. The plurality of local bit lines are connected to the channel body and commonly connected to the global bit line through the contact plug.
A semiconductor memory device comprising:
A method for manufacturing a semiconductor memory device comprising:
Dependencies are inferred from the claim text.