Active matrix liquid crystal display device

A semiconductor device comprising:

• a thin film transistor over a substrate and including a channel forming region, a source region and a drain region;
• a first interlayer insulating film over the thin film transistor;
• a source line over the first interlayer insulating film and electrically connected to the source region;
• a gate line over the substrate, the gate line including a portion which extends in a direction perpendicular to the source line;
• a drain electrode over the first interlayer insulating film and electrically connected to the drain region, wherein the drain electrode at least partly overlaps with the channel forming region and the portion of the gate line;
• an inorganic insulating film over the drain electrode;
• a conductive film over the inorganic insulating film;
• a second interlayer insulating film over the conductive film;
• a pixel electrode over the second interlayer insulating film and electrically connected to the drain electrode;
• and
• a capacitor comprising the drain electrode, the inorganic insulating film and the conductive film wherein the capacitor at least partly overlaps with the channel forming region.