Particle beam device and method for operation of a particle beam device

A particle beam device, comprising:

• a sample chamber;
• a sample which is arranged in the sample chamber;
• a first particle beam column having a first optical axis, wherein the first particle beam column has a first beam generator for generating a first particle beam and has a first objective lens for focusing the first particle beam onto the sample, wherein, when the first particle beam strikes the sample, interactions between the first particle beam and the sample create first interaction particles;
• a second particle beam column having a second optical axis, wherein the second particle beam column has a second beam generator for generating a second particle beam and has a second objective lens for focusing the second particle beam onto the sample, wherein, when the second particle beam strikes the sample, interactions between the second particle beam and the sample create second interaction particles;
• at least one detector which is arranged in a first cavity in a first hollow body, wherein the first cavity has a first inlet opening, wherein a third axis runs from the first inlet opening to the detector, wherein the first optical axis of the first particle beam column and the second optical axis of the second particle beam column are arranged on one plane, wherein the third axis is arranged inclined with respect to or at right angles to the plane, wherein the sample is at a sample potential, wherein the first hollow body is at a first hollow body potential, and wherein a first hollow body voltage is a first potential difference between the first hollow body potential and the sample potential;
• at least one control electrode, which is at a control electrode potential, arranged on the first particle beam column, a control electrode voltage being a third potential difference between the control electrode potential and the sample potential, wherein the second particle beam column has a terminating electrode which is at a terminating electrode potential, wherein a terminating electrode voltage is a fourth potential difference between the terminating electrode potential and the sample potential, and wherein at least one of:
• the first hollow body voltage, the control electrode voltage or the terminating electrode voltage is chosen such that the first interaction particles or the second interaction particles enter the first cavity in the first hollow body through the first inlet opening.