Apparatus for producing trichlorosilane and method for producing trichlorosilane

An apparatus for producing trichlorosilane from a raw gas that includes silicon tetrachloride and hydrogen, comprising:

• a reaction chamber into which the raw gas is introduced to produce a reaction product gas containing trichlorosilane and hydrogen chloride;
• a plurality of heaters that are disposed inside the reaction chamber to heat the raw gas and that that are elongated in the vertical direction;
• and
• a plurality of electrodes connected to basal portions of the heaters,
• wherein the heaters include first heaters each constituted of an exothermic portion that generates heat by electrification through the electrodes;
• and
• second heaters each having a exothermic portion that is shorter than that of the first heater and generates heat by electrification through the electrodes, and a radiation plate that is made of a non-exothermic portion and is connected to an upper end or a lower end of the exothermic portion,
• wherein the first heater and the second heater are disposed such that a partial portion of the exothermic portion of the first heater faces the radiation plate of the second heater;
• the reaction chamber has an introducing port of the raw gas on a side to which the exothermic portions of the second heaters are arranged in positioning relative to the radiation plates of the second heaters;
• and
• the reaction chamber has a discharge port of the reaction product gas on a side to which the radiation plate of the second heater is arranged.