Film forming material feeding apparatus
OwnerKaname Mizokami, Seiji Imanaka +1inventors
InventorsKaname Mizokami, Seiji Imanaka, Yoshinao Ooe
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Abstract
A film forming material feeding apparatus including a feeder, and a chute for sliding film forming materials supplied from the feeder into a material receiving part of a hearth, in which the chute has a bottom part for allowing the film forming materials to slide, and side parts provided at both sides of the bottom part, and the bottom part and the side parts are connected by way of an arc-shape part, and thereby bridging of the film forming materials on the chute is suppressed, so that a stable supply of the film forming materials may be realized.
Claims9
A film forming material feeding apparatus comprising:
- a feeder;
- and
- a chute for sliding a film forming material supplied from the feeder into a material receiving part of a hearth,
- wherein the chute has a bottom part for allowing the film forming material to slide, and side parts provided at both sides of the bottom part, and the bottom part and the side parts are connected by way of an arc-shape part.
Dependencies are inferred from the claim text.