Bonding apparatus and bonding method
AssigneeTokyo Electron Limited
InventorMasahiko Sugiyama
Life of this patent
Estimating the term…
Loading patent…
AssigneeTokyo Electron Limited
InventorMasahiko Sugiyama
Estimating the term…
A bonding apparatus includes a first holding section which places and holds a first member on an upper surface, and a second holding section which adsorbs and holds a second member on a lower surface. The second holding section is configured such that a center section bends due to a predetermined pressure. The second holding section includes an intake mechanism which sucks atmosphere of a bonding space between the first holding section and the second holding section. A protrusion which protrudes downward along an outer circumferential lower surface of the second holding section is formed on the outer circumferential lower surface. A sealing member which holds an air-tightness of the bonding space and has elasticity is formed in a lower surface of the protrusion. A height adjusting mechanism which abuts on the protrusion and can adjust the vertical distance between the first member and the second member is formed on a side surface of the first holding section.
A bonding apparatus for bonding two members to each other, the bonding apparatus comprising:
A bonding method of bonding two members to each other by using a bonding apparatus, the bonding apparatus comprising:
Dependencies are inferred from the claim text.