Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging method

An apparatus comprising:

• a table configured to receive a container that stores an object therein, the container including a bottom surface provided with a positioning groove and including a discharging outlet through which a gas is discharged from the container;
• a positioning pin projecting from the table and adapted to engage with the positioning groove of the container;
• a nozzle configured to discharge the gas from the container through the discharging outlet thereof;
• and
• a drive unit configured to move the nozzle into contact with the discharging outlet of the container after the positioning pin is engaged with the positioning groove.

A method comprising:

• positioning a container, that stores an object therein, on a table, the container including a bottom surface provided with a positioning groove and including a charging inlet thereon, and a positioning pin projecting from the table and adapted to engage with the positioning groove of the container;
• moving a nozzle, that is configured to charge a gas into the container, into contact with the charging inlet of the container after the positioning pin is engaged with the positioning groove;
• and
• charging the gas from the nozzle into the container through the charging inlet.

A method comprising:

• positioning a container, that stores an object therein, on a table, the container including a bottom surface provided with a positioning groove and including a discharging outlet, and a positioning pin projecting from the table and adapted to engage with the positioning groove of the container;
• moving a nozzle, that is configured to discharge a gas from the container, into contact with the discharging outlet of the container after the positioning pin is engaged with the positioning groove;
• and
• discharging the gas from the container into the nozzle through the discharging outlet.

An apparatus comprising:

• a table configured to receive a container that stores an object therein, the container including a gas inlet through which a gas is charged into the container;
• a positioning mechanism configured to position the container onto the table;
• a charging unit configured to charge the gas into the container through the gas inlet;
• a moving mechanism configured to move the charging unit between a first position and a second position, the charging unit in the first position not interfering the positioning of the container onto the table, and the charging unit in the second position contacting with the gas inlet of the container after the positioning mechanism positions the container onto the table.

An apparatus comprising:

• a table configured to receive a container that stores an object therein, the container including a gas inlet through which a gas is charged into the container;
• positioning means for positioning the container onto the table;
• charging means for charging the gas into the container through the gas inlet;
• moving means for moving the charging means between a first position and a second position, the charging means in the first position not interfering the positioning of the container onto the table, and the charging means in the second position contacting with the gas inlet of the container after the positioning meaning means positions the container onto the table.

A load port, comprising:

• a table configured to receive a FOUP (front opening unified pod), a first positioning portion being provided on the table, the FOUP including a bottom surface including a gas inlet and a second positioning portion to engage with the first positioning portion;
• a sensor configured to detect when the first and second positioning portions being engaged with each other and determine that the FOUP is properly positioned on the table;
• a nozzle configured to charge a gas into the FOUP through the gas inlet;
• a moving unit configured to translate the nozzle between a first position and a second position in response to a detection signal from the sensor, the nozzle in the first position not interfering the positioning of the FOUP onto the tale, and the nozzle in the second position contacting the gas inlet of the FOUP and charging the gas into the FOUP through the gas inlet.