Method for manufacturing a solar cell with a two-stage doping

A method for manufacturing a solar cell via a two-stage doping, which comprises the steps of:

• forming an oxide layer, which can be penetrated by a first dopant, on at least one part of a surface of a solar cell substrate;
• forming an opening in the oxide layer in at least one high-doping region by removing the oxide layer in the high-doping region;
• performing a common diffusing step, including:
• diffusing the first dopant into the at least one high-doping region of the solar cell substrate through the opening;
• and
• diffusing the first dopant into the solar cell substrate through the oxide layer, wherein the diffusing through openings and through the oxide layer takes place at a same time in the common diffusing step and the solar cell substrate is diffused in the common diffusing step in an at least partially hydrophilic state.

A solar cell, comprising:

• a solar cell substrate having a front and a back;
• a two-stage doping disposed on said front and formed using a first dopant;
• a doped layer which is formed on said back of said solar cell substrate using a second dopant, the second dopant being of a type opposite to said first dopant, the first dopant diffused into a partial region of said doped layer that faces said back of said solar cell substrate, said first dopant overcompensating said second dopant in said partial region;
• and
• a silicon nitride cover layer disposed at least on said front and said back.