Cleaning solvent and cleaning method for metallic compound
AssigneeL'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des Prodedes Georges Claude
InventorYoichi Sakata
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Abstract
Disclosed are cleaning solvents and cleaning methods for metallic compounds deposited on the equipment that supplies organometallic compounds to the manufacturing tool in the photovoltaic industry or the semiconductor industry. The cleaning solvents and the cleaning methods disclosed not only selectively remove the metallic compound without corroding the equipment, but also improve the ordinary cleaning process. Moreover, the cleaning solvents and the cleaning methods disclosed improve maintenance costs for the supply system because the equipment may be cleaned without being detached from the supply system.
Claims19
A cleaning solvent for removing a metallic compound from equipment parts used in the photovoltaic or semiconductor industry, the cleaning solvent comprising a diluent, an accelerator, and a diketone compound having the formula R1-CO—CHR2-CO—R3, wherein R1, R2, and R3 are independently selected from the group consisting of hydrogen, an alkyl group, and an oxygen-substituted alkyl group, the diketone compound capable of forming a β-diketonate complex with the metallic compound, the diluent capable of dissolving the β-diketonate complex, wherein the cleaning solvent contains no water or supercritical CO2.
A method of cleaning equipment parts used in the photovoltaic or semiconductor industry, the method comprising the steps:
- contacting a surface of the equipment parts contaminated with a metallic compound with a cleaning solvent containing:
- a diluent selected from the group consisting of acetonitrile, acetone, and tetrahydrofuran,
- an accelerator, and
- a diketone compound having the formula R1-CO—CHR2-CO—R3,
- wherein R1, R2, and R3 are independently selected from the group consisting of hydrogen, an alkyl group, and an oxygen-substituted alkyl group;
- and
- removing the cleaning solvent to remove the metallic compound from the surface of the equipment parts.
Dependencies are inferred from the claim text.