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US 2011/0214285 A1Published application
Carbon nanotube and metal thermal interface material, process of making same, packages containing same, and systems containing same
AssigneeIntel Corporation
InventorsGregory M. Chrysler, Thomas S. Dory, James G. Maveety, Edward Prack, Unnikrishnan Vadakkanmaruveedu
Life of this patent
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Abstract
A carbon nanotube (CNT) array is patterned on a substrate. The substrate can be a microelectronic die or a heat sink for a die. The patterned CNT array is patterned by using a patterned catalyst on the substrate to form the CNT array by growing. The patterned CNT array can also be patterned by using a patterned mask on the substrate to form the CNT array by growing. A computing system that uses the CNT array for heat transfer from the die is also used.
Claims15
1-28. (canceled)
A process comprising:
- forming a first carbon nanotube (CNT) array on a first substrate in a first pattern;
- assembling the first substrate to a second substrate that includes a second CNT array with a second pattern that is geometrically complementary to the first pattern.
A process comprising:
- assembling a first substrate to a second substrate, wherein the first substrate includes a patterned array of first carbon nanotubes (CNTs), wherein the second substrate includes a second array of second CNTs on the second substrate, and wherein the first CNT array intermingles with the second CNT array to include vertical contact therebetween.
Dependencies are inferred from the claim text.