US 2011/0214264 A1 · PIEZOELECTRONIC DEVICE AND METHOD OF FABRICATING THE SAME

Abstract

A piezoelectronic device and a method of fabricating the same are disclosed. The piezoelectronic device of the present invention comprises: a plurality of carbon nanotubes; at least one piezoceramic layer covering the plurality of carbon nanotubes; and a supporting material for supporting the carbon nanotubes and disposed between the carbon nanotubes, the supporting layer being coated with at least one piezoceramic layer, wherein the plurality of carbon nanotubes is arranged in a comb-shape. The piezoelectronic device of the present invention is advantageous in having excellent elasticity (durability) and excellent piezoelectronical property. The induced current obtained from the piezoelectronic device of the present invention is about 1.5 μA or above as well as induced voltage being over 1V when the size of the piezoelectronic block is 2.5 mm×1 mm×1 mm (length×width×height).

Claims14

Dependent claims

A method of fabricating a piezoelectronic device, which comprises steps:

(a) providing a substrate;
(b) forming a plurality of carbon nanotubes on the substrate;
(c) forming at least one piezoceramic layer covering the plurality of carbon nanotubes, wherein some of the carbon nanotubes electrically connect with each other through the at least one piezoceramic layer;
(d) filling a space between the carbon nanotubes, which is covered with the at least one piezoceramic layer, with a filling material;
and
(e) removing the substrate to provide a piezoelectronic block comprising the carbon nanotubes, the at least one piezoceramic layer, and the supporting material.

3 more elements

Dependencies are inferred from the claim text.

Piezoelectronic device and method of fabricating the same

Life of this patent

Piezoelectronic device and method of fabricating the same

Life of this patent

Abstract

Claims14