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US 2011/0212673 A1Published application
Polishing pad with partially recessed window
AssigneeApplied Materials, Inc.
InventorsDominic J. Benvegnu, Boguslaw A. Swedek, Jimin Zhang
Life of this patent
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Abstract
A polishing pad has an opaque polishing layer with an aperture therethrough and a polishing surface, and a solid light-transmissive window in the aperture. The solid light-transmissive window includes an outer portion secured to the polishing layer and an inner portion secured to the outer portion. The outer portion has a upper surface recessed relative to the polishing surface, whereas the inner portion has an upper surface that is substantially co-planar with the polishing surface.
Claims17
A polishing pad, comprising:
- an opaque polishing layer having an aperture therethrough and having a polishing surface;
- and
- a solid light-transmissive window in the aperture, the solid light-transmissive window including
- an outer portion directly contacting and secured to a sidewall of the aperture through the polishing layer, the outer portion having a upper surface recessed relative to the polishing surface, the upper surface not covered by the polishing layer, and
- an inner portion secured to the outer portion, the inner portion having an upper surface that is substantially co-planar with the polishing surface, wherein the outer portion completely surrounds the inner portion.
2 more elements
Dependencies are inferred from the claim text.