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US 2011/0212672 A1Published application
Flexible Membrane for Carrier Head
AssigneeApplied Materials, Inc.
InventorsSteven M. Zuniga, Andrew J. Nagengast, Jeonghoon Oh
Life of this patent
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Abstract
A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
Claims16
A flexible membrane, comprising:
- a main portion with a lower surface to provide a substrate-mounting surface;
- and
- an outer annular portion extending substantially vertically from an outer edge of the main portion, wherein the outer annular portion comprises a lower edge connected to the main portion and an upper edge that is substantially laterally aligned with the lower edge, and wherein the outer annular portion comprises an outer surface that includes a first annular recess located between the upper edge and the lower edge and a second annular recess located between the first annular recess and the upper edge.
Dependencies are inferred from the claim text.