Methods of bonding superabrasive particles in an organic matrix
OwnerChien-Min Sunginventor
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Abstract
Superabrasive tools and their methods of manufacture are disclosed. In one aspect, a method of improving retention of superabrasive particles held in a solidified organic material layer of an abrading tool, a portion of each of said superabrasive particles protruding out of the solidified organic material layer is provided. The method may include securing a plurality of superabrasive particles in the solidified organic material layer in an arrangement that minimizes mechanical stress impinging on the protruding portion of any individual superabrasive particle when used to abrade a work piece. As an example, the arrangement of the plurality of superabrasive particles may be configured to uniformly distribute frictional forces across substantially each superabrasive particle.
Claims20
A method of improving superabrasive particle retention in a CMP pad dresser having a plurality of superabrasive particles held in a solidified organic material layer with a portion thereof protruding out of the solidified organic material layer for contact with and dressing of a CMP pad, comprising:
- securing the plurality of superabrasive particles in the solidified organic material layer in an arrangement that minimizes mechanical stress impinging on the protruding portion of any individual superabrasive particle when used to dress a CMP pad.
A CMP pad dresser comprising:
- a substrate;
- a solidified organic material layer attached to the substrate;
- and
- a plurality of superabrasive particles secured in the solidified organic material layer with a portion thereof protruding out of the organic material layer for the purpose of engaging and dressing a CMP pad, said plurality of superabrasive particles secured in the solidified organic material layer in an arrangement that minimizes mechanical stress impinging on the protruding portion of any individual superabrasive particle when used to dress a CMP pad.
Dependencies are inferred from the claim text.