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US 2011/0212562 A1Published application
Method of producing a biosensor
AssigneeMitsumi Electric Co., Ltd.
InventorsHiroaki KIKUCHI, Tomoaki YAMABAYASHI, Osamu TAKAHASHI
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Abstract
A method for manufacturing a biosensor includes forming a laminate of a first silicon oxide film and a polysilicon film on one surface of a silicon substrate; forming a second silicon oxide film on the other surface of the silicon substrate; forming a source electrode, a drain electrode, and a channel on the first silicon oxide film, the channel connecting the source electrode and the drain electrode; and removing the polysilicon film.
Claims4
A method for manufacturing a biosensor including:
- a silicon substrate;
- a first silicon oxide film formed on one surface of the silicon substrate;
- a reaction field formed on the first silicon oxide film;
- a gate electrode formed on or above the first silicon oxide film;
- a second silicon oxide film formed on the other surface of the silicon substrate;
- a source electrode formed on the second silicon oxide film;
- a drain electrode formed on the second silicon oxide film;
- and a channel connecting the source electrode and the drain electrode, the channel formed on the second silicon oxide film, the method comprising:
- forming a laminate of a first silicon oxide film and a polysilicon film on one surface of a silicon substrate;
- forming a second silicon oxide film on the other surface of the silicon substrate;
- forming a source electrode, a drain electrode, and a channel on the second silicon oxide film, the channel connecting the source electrode and the drain electrode;
- removing the polysilicon film;
- and
- disposing a gate electrode on or above the one surface of the silicon substrate.
11 more elements
Dependencies are inferred from the claim text.