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US 2011/0212551 A1Published application
Contactor, test device for semiconductor apparatus, and method for manufacturing semiconductor apparatus
AssigneeFujitsu Semiconductor Limited
InventorsShigeyuki MARUYAMA, Yoshihiro Sekizawa, Tomohiro Suzuka
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Abstract
A contactor includes a contactor base material including a first material and a conductor film including a second material. The conductor film is formed only on a contact surface with an electrode of a semiconductor apparatus at a tip of the contactor film.
Claims19
A contactor, comprising:
- a contactor base material including a first material;
- and
- a conductor film including a second material, the conductor film being formed only on a contact surface with an electrode of a semiconductor apparatus at a tip of the contactor film.
A test device for semiconductor apparatus, comprising:
- a switching circuit to select one of a test signal and a voltage which is higher than a maximum voltage of a test signal and is not used in a test, and to supply the selected one to a contactor.
A method for manufacturing a semiconductor apparatus, comprising:
- testing a semiconductor apparatus by supplying a test signal from a contactor to an electrode of the semiconductor apparatus while a tip of the contactor is contacting the electrode;
- applying a cleaning voltage between a first conductor and the contactor while the tip of the contactor is being placed against the first conductor, the cleaning voltage being greater than a maximum voltage of the test signal;
- and
- separating the contactor from the first conductor, and transferring a electrode material adhering to the tip of the contactor from the contactor to the first conductor.
1 more element
Dependencies are inferred from the claim text.