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US 2011/0212319 A1Published application
Carbon nanotube device and a wafer for growing carbon nanotube
OwnerLi-Chun Wang, Han-Wen Kuo +5inventors
InventorsLI-CHUN WANG, Han-Wen Kuo, Yuh Sung, Shiaw-Ruey Lin, Ming-Der Ger, Yih-Ming Liu, Wei-Ta Chang
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Abstract
The invention discloses a carbon nanotube device, comprising a substrate, a catalyst layer formed on the substrate, a porous capping layer formed on the catalyst layer, and a carbon nanotube formed on the porous capping layer. A wafer for growing a carbon nanotube comprises a substrate, a catalyst layer formed on the substrate, and a porous capping layer formed on the catalyst layer, with carbon nanotube growning on the porous capping layer.
Claims12
A wafer for growing a carbon nanotube, comprising:
- a substrate;
- a catalyst layer formed on the substrate;
- and
- a porous capping layer formed on the catalyst layer;
- wherein the carbon nanotube is grown on the porous capping layer.
2 more elements
A carbon nanotube device, comprising:
- a substrate;
- a catalyst layer formed on the substrate;
- a porous capping layer formed on the catalyst layer;
- and
- a carbon nanotube formed on the porous capping layer.
2 more elements
Dependencies are inferred from the claim text.