US 2011/0212272 A1Published application

Manufacturing method for magnetic recording medium

AssigneeUlvac, Inc.

InventorsTsutomu NISHIHASHI, Kazuhiro Watanabe, Tadashi Morita, Kenji Sato, Tsutomu Tanaka, Takuya Uzumaki

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Abstract

A magnetic recording medium having a high magnetic pattern contrast is manufactured. By changing an acceleration voltage that accelerates ions in a process gas, depths (peak depths D0 and D1) from a magnetic layer 44, at which an injection amount of a target element is the maximum, can be made with set depths even if a film thickness of an ion permeation portion 48, which is a thin film portion of a resist 49, decreases. Since the set depths are achieved for the peak depths D0 and D1, a portion to be processed 43 of the magnetic film 44 is made non-magnetized from a top surface to a bottom surface, and a magnetic portion is separated; thus, the magnetic recording medium with a high magnetic pattern contrast can be obtained.

Claims5

Dependent claims

A manufacturing method for a magnetic recording medium, comprising steps of:

arranging a resist that includes an ion shielding portion and an ion permeation portion having a film thickness thinner than the thickness of the ion shielding portion on a magnetic film of an object to be processed having a substrate and the magnetic film arranged on a surface of the substrate;
and
injecting the constituent element of a process gas in the portion to be processed where the ion permeation portion of the magnetic film is located in order to become non-magnetize, by accelerating ion of the process gas and by permeating a constituent element of the process gas through the ion permeation portion,
wherein the constituent element of the process gas is injected by changing an acceleration voltage that accelerates the ions of the process gas so as to make non-magnetize the portion to be processed.

1 more element

Dependencies are inferred from the claim text.