Material supply system and method
OwnerRicky Charles Powell, Andrew Kelly Gray +1inventors
InventorsRicky Charles Powell, Andrew Kelly Gray, Todd Alden Coleman
Life of this patent
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Abstract
A system and a method for feeding a solid into a solid deposition system is described. Solid contained in a hopper is directed into a vibratory bowl. The frequency of the vibrations of the vibratory bowl can be modulated by a feedback system. The solid can then be entrained in a carrier gas which can flow to a distributor for deposition on a substrate.
Claims24
A vibratory bowl, comprising:
- a supply reservoir, a divider, and a ramp having a first end adjacent to the supply reservoir and a second end adjacent to the divider.
A method for delivering a solid, comprising:
- directing a solid from a supply reservoir up a ramp to a divider, and separating the solid into a return portion and an output portion.
21-42. (canceled)
A loading system, comprising:
- a powder supply;
- a vacuum system;
- a fill port configured to deliver powder into the vacuum system;
- a vibratory feeder;
- and a load hopper connected to the vacuum system.
A method of loading a sealed solid delivery system under reduced pressure, comprising the steps of:
- detecting a low level of a solid in a load hopper connected by a first valve to the sealed solid delivery system;
- closing the first valve;
- closing a second valve between the load hopper and a vacuum system;
- opening a third valve located between the load hopper and a solid supply;
- opening a fourth valve configured to vent the load hopper;
- transferring solid from the solid supply to the load hopper;
- closing the third and fourth valves;
- and opening the first and second valves.
Dependencies are inferred from the claim text.