Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus

1:

• A manufacturing method for manufacturing a surface-emitting laser device that emits laser light in a direction perpendicular to a substrate, the manufacturing method comprising:
• a step of forming a laminated body in which a lower reflecting mirror, a resonator structure including an active layer, and an upper reflecting layer having a selective oxidized layer are laminated on the substrate;
• a step of etching the laminated body to form a mesa structure having the selective oxidized layer exposed at side surfaces thereof;
• a step of selectively oxidizing the selective oxidized layer from the side surfaces of the mesa structure to form a constriction structure in which a current passing region is surrounded by an oxide;
• a step of forming a separating groove at a position away from the mesa structure;
• a step of passivating an outermost front surface of at least a part of the laminated body exposed when the separating groove is formed;
• and
• a step of coating a passivated part with a dielectric body.