Thermal control of optical filter with local silicon frame
AssigneeEmcore Corporation
InventorsMarc Finot, Mark McDonald, Andrew Daiber
Life of this patent
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Abstract
Briefly, in accordance with one or more embodiments, a thermally controlled optical filter comprises a frame coupled to an etalon where the frame includes a resistive thermal device disposed on the frame to obtain thermal measurements of the etalon during operation. The frame may be generally L-shaped or generally square-shaped. The frame may include a fillet that is generally planar, generally beveled or trapezoidal, or generally circular in shape. A heater may be additionally disposed on the frame. The etalon and frame subassembly may be bonded to a micro hot plate that is capable of heating the etalon to an operational temperature.
Claims7
A method, comprising:
- generating an optical beam with a laser;
- filtering the optical beam to select a desired wavelength with an etalon positioned in a path of the optical beam;
- heating the etalon to an operational temperature using a heater;
- monitoring the operational temperature of the etalon with a resistive thermal device disposed in or on a thermally conductive frame bonded to the etalon;
- and
- applying feedback control of the heater based on the monitoring to select the desired wavelength.
Dependencies are inferred from the claim text.