Device and method for acquiring position with a confocal fabry-perot interferometer
AssigneeAttocube Systems AG
InventorsKhaled KARRAI, Pierre-Francois Braun
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Abstract
Device and method for acquiring position with a confocal Fabry-Perot interferometer. In a general aspect, the device for acquiring position may include an arrangement for acquiring position where the acquiring arrangement has a confocal Fabry-Perot interferometer. In another general aspect, a method for acquiring position may include generating an interference pattern dependent on a position of an object by a confocal Fabry-Perot interferometer; detecting the interference pattern to obtain a measuring signal; and evaluating the measuring signal.
Claims21
A device for acquiring position, comprising:
- means for acquiring position, the acquiring means having a confocal Fabry-Perot interferometer.
A method for acquiring position, comprising:
- generating an interference pattern dependent on a position of an object by means of a confocal Fabry-Perot interferometer;
- detecting the interference pattern to obtain a measuring signal;
- and
- evaluating the measuring signal.
Dependencies are inferred from the claim text.