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US 2011/0210751 A1Published application
Chemical sensor using thin-film sensing member
AssigneeSamsung Electronics Co., Ltd.
InventorsKi-ha Hong, Hyuk-soon Choi, Jong-seob Kim, Jai-kwang Shin
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Abstract
Provided is a chemical sensor that may include a first electrode on a substrate, a sensing member covering the first electrode on the substrate, and a plurality of second electrodes on a surface of the sensing member exposing the surface of the sensing member. The chemical sensor may be configured to measure the change in electrical characteristics when a compound to be sensed is adsorbed on the sensing member. Provided also is a chemical sensor array including an array of chemical sensors.
Claims17
A chemical sensor comprising:
- an electrode on a substrate;
- and
- a sensing member covering the electrode,
- wherein the electrode includes a plurality of nanowires.
1 more element
A chemical sensor comprising:
- a first electrode on a substrate;
- a sensing member covering the first electrode;
- and
- a first electrode pad connected to the first electrode,
- wherein the first electrode is a flat panel electrode.
2 more elements
Dependencies are inferred from the claim text.