Integrated magnetic sensor for detecting horizontal magnetic fields and manufacturing process thereof

An apparatus, comprising:

• a control circuit;
• and
• an integrated magnetic sensor coupled to the control circuit and including:
• a chip including a semiconductor body, having a surface, and an insulating layer covering the surface of the body;
• a magnetically sensitive region extending within the body or on the body;
• a concentrator of ferromagnetic material extending inside the insulating layer, having a planar portion extending substantially parallel to the surface of the body, and having an end portion extending transversely from the planar portion toward the magnetically sensitive region.

A process, comprising:

• manufacturing a magnetic sensor integrated in a chip and configured to detect an external magnetic field, the manufacturing including:
• providing a body of semiconductor material having a surface;
• forming, on the surface, an insulating layer having a cavity;
• forming a magnetically sensitive region within the body or within the insulating layer;
• forming a concentrator of a ferromagnetic material within the insulating layer, forming the concentrator including:
• forming, from a ferromagnetic layer, a planar portion substantially parallel to the surface and an end portion extending within the cavity, from a peripheral portion of the planar portion, the end portion extending transversely to the planar portion, toward the magnetically sensitive region.