US 2011/0210668 A1Published application

Electron cyclotron resonance ion generator

AssigneesCommissariat A L'energie Atomique Et Aux Energies Alternatives, Centre National De La Recherche Scientifique

InventorsJean-Yves Pacquet, Gabriel Gaubert

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Abstract

An electron cyclotron resonance ion generator includes a vacuum-tight chamber configured to contain a plasma, a magnetic field generator configured to generate a magnetic field in the chamber, a waveguide configured to propagate a high-frequency wave inside the chamber, a first ionisation stage located at one end of the chamber, the first stage including an ionisation zone in which ions are generated, the magnetic field being approximately parallel to a longitudinal axis in the ionisation zone, a second magnetic confinement stage for the ions generated in the ionisation zone, the second stage using a first high-frequency wave being propagated in the chamber from the waveguide, the magnetic field being approximately parallel to the longitudinal axis between the ionisation zone and the second confinement stage, such that the ions generated in the ionisation zone migrate towards the second confinement stage and the first and second stages contain the same continuous plasma.

Claims13

Dependent claims

An electron cyclotron resonance ion generator comprising:

a vacuum-tight chamber configured to contain a plasma, said chamber having an axial symmetry along a longitudinal axis,
a magnetic field generator configured to generate a magnetic field in said chamber, said magnetic field having a symmetry of revolution with respect to said longitudinal axis,
a waveguide configured to propagate a high-frequency wave inside said chamber,
a first ionisation stage located at one end of said chamber, said first stage comprising an ionisation zone in which ions are generated, said magnetic field being approximately parallel to said longitudinal axis in said ionisation zone,
a second magnetic confinement stage for said ions generated in said ionisation zone, said second stage using a first high-frequency wave being propagated in said chamber from said waveguide,
said magnetic field being approximately parallel to said longitudinal axis between said ionisation zone and said second confinement stage, such that the ions generated in said ionisation zone migrate towards said second confinement stage and that said first and second stages contain the same continuous plasma.

3 more elements

Dependencies are inferred from the claim text.