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AssigneeInternational Business Machines Corporation
InventorsSATYA V. NITTA, Shom Ponoth
Estimating the term…
A dual damascene article of manufacture comprises a trench containing a conductive metal column where the trench and the conductive metal column extend down into and are contiguous with a via. The trench and the conductive metal column and the via have a common axis. These articles comprise interconnect structures incorporating air-gap spacers containing metal/insulator structures for Very Large Scale Integrated (VLSI) and Ultra Large Scale Integrated (ULSI) devices and packaging. The trench in this regard comprises a sidewall air-gap immediately adjacent the side walls of the trench and the conductive metal column, the sidewall air-gap extending down to the via to a depth below a line fixed by the bottom of the trench, and continues downward in the via for a distance of from about 1 Angstrom below the line to the full depth of the via. In another aspect, the article of manufacture comprises a capped dual damascene structure.
A dual damascene article of manufacture comprising a trench containing a conductive metal column, said trench and said conductive metal column extending down into and contiguous with a via, said trench and said conductive metal column and said via having a common axis, wherein said trench further comprises a sidewall air-gap adjacent the side walls of said trench, said via, and said conductive metal column, said sidewall air-gap being on opposite sides of said trench and said via and extends down to said via to a depth below a line fixed by the bottom of said trench, and continues downward fully in said via for a distance of from about 1 Angstrom below said line to the full depth of said via, where said conductive metal column comprises a metallization liner contiguous with and on opposite sides of said conductive metal column.
A dual damascene article of manufacture comprising a trench containing a conductive metal column said trench and said conductive metal column extending down into and contiguous with a via, said trench and said conductive metal column and said via having a common axis, wherein said trench further comprises a sidewall air-gap immediately adjacent said side walls of said trench and said conductive metal column, said sidewall air-gap being on opposite sides of said trench and said metal column and extending to said via, wherein the width of said sidewall air-gap varies from about 1 Angstrom to about 1000 Angstroms, and said via does not have a sidewall air-gap, where said conductive metal column comprises a metallization liner contiguous with and on opposite sides of said conductive metal column.
A capped dual damascene article of manufacture comprising a trench containing a conductive metal column said trench and said conductive metal column extending down into and contiguous with a via, said trench and said conductive metal column and said via having a common axis, wherein said trench further comprises a sidewall air-gap immediately adjacent said side walls of said trench and said conductive metal column, said sidewall air-gap extending down to said via, said sidewall air-gap being on opposite sides of said trench, said metal column and said via, said article of manufacture further comprising a perforated pinched off cap operatively associated with said article, said perforated pinched off cap having seams in it, where said conductive metal column comprises a metallization liner contiguous with and on opposite sides of said conductive metal column.
A capped dual damascene article of manufacture comprising a via and a trench containing a conductive metal column, said trench and said conductive metal column having a common axis, wherein said trench further comprises a sidewall air-gap immediately adjacent only to the side walls of said trench and said conductive metal column, said sidewall air-gap being on opposite sides of said trench and said metal column, said article of manufacture further comprising a perforated pinched off cap operatively associated with said article, said perforated pinched off cap having seams in it, where said conductive metal column comprises a metallization liner contiguous with and on opposite sides of said conductive metal column.
Dependencies are inferred from the claim text.