Semiconductor device and manufacturing method thereof
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei YAMAZAKI, Junichiro SAKATA, Jun KOYAMA
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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei YAMAZAKI, Junichiro SAKATA, Jun KOYAMA
Estimating the term…
A semiconductor device which includes a thin film transistor having an oxide semiconductor layer and excellent electrical characteristics is provided. Further, a method for manufacturing a semiconductor device in which plural kinds of thin film transistors of different structures are formed over one substrate to form plural kinds of circuits and in which the number of steps is not greatly increased is provided. After a metal thin film is formed over an insulating surface, an oxide semiconductor layer is formed thereover. Then, oxidation treatment such as heat treatment is performed to oxidize the metal thin film partly or entirely. Further, structures of thin film transistors are different between a circuit in which emphasis is placed on the speed of operation, such as a logic circuit, and a matrix circuit.
A semiconductor device comprising:
A semiconductor device comprising a circuit, the circuit comprising:
A semiconductor device comprising an inverter circuit, the inverter circuit comprising:
A semiconductor device comprising an inverter circuit, the inverter circuit comprising:
A semiconductor device comprising a circuit, the circuit comprising:
Dependencies are inferred from the claim text.